Modeling of Cone Deposition Process for Field

The Field emitter display (FED) is a very promising type of flat panel display. It possesses the potential to combine the performance of the Cathode Ray Tube with the compactness of the Liquid Crystal Display, while offering the additional advantage of low power consumption. The performance and reliability of the FED depend strongly upon the geometry of the deposited emitter cones. The formation of this cone is affected by the geometry of the trench into which it is deposited, as well as processing parameters such as temperature and the angular distributiuon of deposition flux. The affect of each of these parameters upon evolution of the emitter cones is investigated, in an effort to eliminate much of the guesswork currently used when desigining processes to produce FED's. This study concludes that the parting layer angle and flux distribution are the most important factors influencing the final shape of the emitter cones.